SUBSTRATE PROCESSING APPARATUS

摘要

A substrate processing apparatus is provided to improve substrate processing performance by reducing a waiting time of a process chamber during a substrate loading period of a load lock chamber. One or more process chambers(120a,120b) include substrate loading parts for loading a plurality of substrates. A plurality of load lock chambers(130a,130b) are formed to store the substrates to be loaded into the process chambers. The number of the substrates stored in the load lock chambers corresponds to a multiple of the substrates. A transfer chamber(110) is connected with each of the process chambers and each of the load lock chambers. A transfer robot(112) is installed in the inside of the transfer chamber to transfer the substrates.