发明名称 |
SEMICONDUCTOR DEVICE TESTER, TEST SYSTEM FOR SEMICONDUCTOR DEVICE HAVING PLURAL SEMICONDUCTOR DEVICE TESTER, AND TESTING METHOD FOR SEMICONDUCTOR DEVICE USING THE SAME |
摘要 |
A semiconductor tester, a semiconductor device test system including the same, and a semiconductor device test method using the same are provided to achieve unmanned automation by using a transfer unit and a pickup transfer unit. A supply and discharge unit(100) supplies a semiconductor device as a test target and discharges the semiconductor device of high quality. A test unit includes a plurality of test regions(210) having an insertion hole into which the semiconductor device is inserted. An inferior semiconductor device loading unit(300) loads the semiconductor device of low quality. A transfer unit(400) is positioned between the supply and discharge unit and the test unit to transfer the semiconductor device from the supply and discharge unit to the test unit.
|
申请公布号 |
KR20080087459(A) |
申请公布日期 |
2008.10.01 |
申请号 |
KR20070029718 |
申请日期 |
2007.03.27 |
申请人 |
SECRON CO., LTD. |
发明人 |
KIM, JAE SU;SEO, JUNG HO;KIM, YOUNG IL |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|