发明名称 SEMICONDUCTOR DEVICE TESTER, TEST SYSTEM FOR SEMICONDUCTOR DEVICE HAVING PLURAL SEMICONDUCTOR DEVICE TESTER, AND TESTING METHOD FOR SEMICONDUCTOR DEVICE USING THE SAME
摘要 A semiconductor tester, a semiconductor device test system including the same, and a semiconductor device test method using the same are provided to achieve unmanned automation by using a transfer unit and a pickup transfer unit. A supply and discharge unit(100) supplies a semiconductor device as a test target and discharges the semiconductor device of high quality. A test unit includes a plurality of test regions(210) having an insertion hole into which the semiconductor device is inserted. An inferior semiconductor device loading unit(300) loads the semiconductor device of low quality. A transfer unit(400) is positioned between the supply and discharge unit and the test unit to transfer the semiconductor device from the supply and discharge unit to the test unit.
申请公布号 KR20080087459(A) 申请公布日期 2008.10.01
申请号 KR20070029718 申请日期 2007.03.27
申请人 SECRON CO., LTD. 发明人 KIM, JAE SU;SEO, JUNG HO;KIM, YOUNG IL
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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