发明名称 |
Method and device for analyzing the surface of a substrate |
摘要 |
A process for scanning a surface of a substrate, which process takes at least one reflected image of at least one test pattern on the surface and extracts by digital processing local phases in two directions. Variations in local slopes are calculated by digital processing from the local phases to deduce therefrom variations in curvature or variations in altitude of the surface.
|
申请公布号 |
US7430049(B2) |
申请公布日期 |
2008.09.30 |
申请号 |
US20040432269 |
申请日期 |
2004.04.05 |
申请人 |
SAINT-GOBAIN GLASS FRANCE |
发明人 |
BERTIN-MOUROT THOMAS;DOUCHE JEAN-PIERRE;GERMOND DANIEL;GUERING PAUL-HENRI;SURREL YVES |
分类号 |
G01B11/24;G01B11/30;G01B11/25;G01N21/896;G01N21/956;G01N21/958 |
主分类号 |
G01B11/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|