| 摘要 |
A probe card assembly (300) has a probe contactor substrate (310) having a plurality of probe contactor tips (395) thereon and a probe card wiring board (330) with an interposer (340) disposed between the two. Support posts (320) contacting the probe contactor substrate are vertically adjustable until secured by a locking mechanism (380) which is coupled to the probe card wiring board. When the posts are secured in a fixed position, the position is one in which the plane of the plurality of probe contactor substrates is substantially parallel to a predetermined reference plane. |
