| 摘要 |
A MEMS scanner system and method, the system for deflecting an incident laser beam including a MEMS mirror (26) operable to receive the incident laser beam and to generate a reflected laser beam, and an opaque plate 28 having an aperture 30, the opaque plate (28) being opposite the MEMS mirror (26). The aperture (30) is sized to permit the incident laser beam and the reflected laser beam to pass through the aperture (30).
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