Planar evaporation device for depositing material onto a substrate and apparatus for forming a thin layer using the same,申请号KR20060135135-传众专利搜索

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发明名称	Planar evaporation device for depositing material onto a substrate and apparatus for forming a thin layer using the same
摘要
申请公布号	KR100861089(B1)	申请公布日期	2008.09.30
申请号	KR20060135135	申请日期	2006.12.27
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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