发明名称 APPARATUS AND METHOD FOR CLEANING ELECTRONIC COMPONENTS
摘要 <p>APPARATUS AND METHOD FOR CLEANING ELECTRONIC COMPONENTS The invention provides an apparatus and method for cleaning a plurality of electronic components. A tank is provided for containing a cleaning fluid and an ultrasonic resonator is mounted in communication with the cleaning fluid for charging ultrasonic energy thereto. A support platform positionable over a top surface of the cleaning fluid supports the electronic components such that the electronic components are in contact with said top surface of the cleaning fluid in use. Further, a cleaning fluid supply system is configured to generate a continuous flow of cleaning fluid into the tank for cleaning the electronic components in contact with said top surface of the cleaning fluid.</p>
申请公布号 SG145610(A1) 申请公布日期 2008.09.29
申请号 SG20070047673 申请日期 2003.11.20
申请人 ASM ASSEMBLY AUTOMATION LTD 发明人 WAH CHENG CHI;KO WONG YUI;WAI MAK TIM
分类号 H01L21/304;B08B3/12;H01L21/00;H01L21/48;(IPC1-7):B08B3/10 主分类号 H01L21/304
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