发明名称 |
APPARATUS AND METHOD FOR CLEANING ELECTRONIC COMPONENTS |
摘要 |
<p>APPARATUS AND METHOD FOR CLEANING ELECTRONIC COMPONENTS The invention provides an apparatus and method for cleaning a plurality of electronic components. A tank is provided for containing a cleaning fluid and an ultrasonic resonator is mounted in communication with the cleaning fluid for charging ultrasonic energy thereto. A support platform positionable over a top surface of the cleaning fluid supports the electronic components such that the electronic components are in contact with said top surface of the cleaning fluid in use. Further, a cleaning fluid supply system is configured to generate a continuous flow of cleaning fluid into the tank for cleaning the electronic components in contact with said top surface of the cleaning fluid.</p> |
申请公布号 |
SG145610(A1) |
申请公布日期 |
2008.09.29 |
申请号 |
SG20070047673 |
申请日期 |
2003.11.20 |
申请人 |
ASM ASSEMBLY AUTOMATION LTD |
发明人 |
WAH CHENG CHI;KO WONG YUI;WAI MAK TIM |
分类号 |
H01L21/304;B08B3/12;H01L21/00;H01L21/48;(IPC1-7):B08B3/10 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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