| 摘要 |
<p>SUBSTRATE SUPPORT ASSEMBLY A substrate support assembly comprises a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to a chamber component. A cover lock comprises an annular disc that is seated in the arm beneath the first clamp to cover and seal off electrical conductors in the channel from the chamber environment.</p> |
