LIQUID MATERIAL APPLYING APPARATUS

摘要

An applying apparatus is provided to be capable of controlling plural pitches of nozzles in high accuracy without applying flowable material on a substrate. An applying apparatus(1) includes a substrate holding part(11) which holds a substrate(9), a substrate moving part(12) which moves the substrate holding part in a direction parallel with the main surface of the substrate, a substrate rotation part(12a) which rotates the substrate holding part with a rotation axis perpendicular to the main surface of the substrate and a heating part in inside thereof.