METHOD FOR MEASUREMENT OF EVAPORATION AMOUNT USING QUARTZ CRYSTAL MICROBALANCE

摘要

A method for measuring evaporation amount of organic compounds using QCM(Quartz Crystal Microbalance) is provided to calculate organic compounds which are evaporated from evaporation nozzles accurately by calculating frequencies which are outputted and transmitted from the first and second crystal oscillators by an inverse number of harmonic mean. A method for measuring evaporation amount of organic compounds using quartz crystal microbalance comprises the steps of: carrying out an organic compound deposition process(S401); applying alternating current voltages to first and second crystal oscillators respectively under the control of a controller(S402); outputting intrinsic frequency by a piezoelectric phenomenon when the alternating current voltages are applied, and transmitting each frequency which is outputted to a frequency calculator(S403); calculating the frequencies which are outputted and transmitted from the first and second crystal oscillators by an inverse number of harmonic mean(S404); and calculating organic evaporation volume evaporated from evaporation nozzles by considering the inverse number of the harmonic mean and variables of a deposition device(S405).