| 摘要 |
A method for manufacturing a polycrystalline silicon is provided to directly react an non-reacted reducing agent and a silicon particle contained in an exhaust gas consisting mainly of a reducing agent chloride gas produced as a by-product during manufacturing of a silicon from silicon chloride using a reducing method with chloride gas, in order to significantly reduce the amount of impurities contained in the by-product reducing agent chloride and to convert the reducing agent chloride into a form suitable for electrolysis. A method for manufacturing a polycrystalline silicon to perform a gas phase reaction of a silicon chloride gas(G) and a reducing agent gas in a reactor(1) includes the steps of: blowing a chlorine gas into an exhaust gas containing a reducing agent chloride gas produced as a by-product in the gas phase reaction and non-reacted gases to initiate a reaction; separating a reducing agent chloride(D) contained in the exhaust gas from other impurities; and reproducing the reducing agent chloride. The reaction initiated by blowing the chlorine gas into the exhaust gas is performed by blowing the chlorine gas into the exhaust gas from a chlorine gas introducing pipe provided in a chlorination reaction device connected with the reactor in which the gas phase reaction of the silicon chloride gas and the reducing agent gas is performed.
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