发明名称 EPOXY FORMULATIONS FOR USE IN LITHOGRAPHY TECHNIQUES
摘要 A method for preparing a patterned feature includes the steps of I) casting a curable silicone composition against a master, II) curing the curable silicone composition to form a silicone mold, II) separating the master and the silicone mold, IV) filling a silicone mold having a patterned surface with a curable epoxy formulation; V) curing the curable epoxy formulation to form a patterned feature; VI) separating the silicone mold and the patterned feature; optionally VIII) etching the patterned feature; optionally IX) cleaning the silicone mold; and optionally X) repeating steps IV) to IX) reusing the silicone mold.
申请公布号 KR20080085895(A) 申请公布日期 2008.09.24
申请号 KR20087018407 申请日期 2007.01.23
申请人 DOW CORNING CORPORATION 发明人 CHEN WEI;HARKNESS BRIAN ROBERT;MAGHSOODI SINA;TONGE JAMES STEVEN
分类号 G03F7/00;B29C35/08;C08G59/22;G03F7/038 主分类号 G03F7/00
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