发明名称 |
SHEET PLASMA FILM-FORMING APPARATUS |
摘要 |
<p>A sheet plasma film forming apparatus (100) of the present invention includes: a plasma gun (40) which can emit source plasma (22) in a transport direction; a sheet plasma converting chamber (20) including a transport space (21) extending in the transport direction; a pair of first magnetic field generating means (24A, 24B) disposed so as to sandwich the transport space (21) such that same poles thereof face each other; a film forming chamber (30) including a film forming space (31) which communicates with the transport space (21); and a pair of second magnetic field generating means (32, 33) disposed so as to sandwich the film forming space such that different poles thereof face each other, wherein: while moving in the transport space (21), the source plasma (22) is converted by a magnetic field of the pair of first magnetic field generating means (24A, 24B) into sheet-shaped plasma spreading along a main surface S including a center; and while moving in the film forming space (31), the sheet-shaped plasma 27 is caused to convexly project from the main surface S by a magnetic field of the pair of second magnetic field generating means (32, 33).</p> |
申请公布号 |
EP1972700(A1) |
申请公布日期 |
2008.09.24 |
申请号 |
EP20060833564 |
申请日期 |
2006.11.29 |
申请人 |
SHINMAYWA INDUSTRIES, LTD. |
发明人 |
MARUNAKA, MASAO;TSUCHIYA, TAKAYUKI;TERAKURA, ATSUHIRO;TAKEUCHI, KIYOSHI |
分类号 |
C23C14/34;H01L21/285;H05H1/48 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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