| 摘要 |
A probe unit and an inspection apparatus are provided to prevent the influence of noise and to improve inspection accuracy regardless of TFT driving at high speed. A probe unit(41) comprises: a probe assembly to connect to an electrode of a circuit formed on a surface of a plate to be inspected and transfer an inspection signal; and a connect cable portion(42) to electrically connect the probe assembly to an external apparatus via a printed board of a probe base, wherein the connect cable portion comprises an FPC plate to secure the connect cable portion to the probe assembly, a drive integrated circuit(43) to process according to the inspection, and an FPC cable(47) to transfer an electric signal for the inspection, and wherein the drive integrated circuit is mounted to the printed board of the probe base, and the FPC cable connects the drive integrated circuit to the probe assembly.
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