| 摘要 |
A magnetron cathode assembly 1 according to the present invention comprises a drive shaft 2, one end 5 thereof being connected with a cathode/target assembly in the interior space 4 of a vacuum chamber. A housing 3 is rigidly mounted to the wall of a coating chamber of a sputter coating device by a flange 3a. Between the housing 3 and the drive shaft 2 a combined axial and radial bearing 1 l, e. g. a cross roller bearing, is arranged. The bearing supports the shaft 2 rotatably relative to the housing 3. By providing a combined axial and radial bearing 11 the installation space d of the assembly 1 may be reduced.
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