| 摘要 |
<p>To obtain an optical waveguide device capable of improving mounting accuracy and productivity for correcting misalignment of alignment marker caused by distortion due to a substrate stressed and distorted. An optical waveguide device includes an optical waveguide section (10), including a waveguide core (13) formed on a substrate (11), and an optical device (18) (LD) mounted on the substrate (11) to correspond the optical waveguide section (10), both of which are coupled at a light end face and mounted by hybrid mounting. LD side alignment markers (18A,18B) are provided in both sides of an active line (25) in the optical device (18). Substrate side alignment markers (20) are provided at positions where centers thereof and those of the optical device side markers (18A,18B) are matched when the optical device (18) is mounted on the corresponding substrate (11). Fiducial markers (24A,24B) are formed during the formation of the core (13) so that the relative positional relationship with the waveguide core (13) on the substrate (11) becomes stable. Thus, a misalignment amount is detected.</p> |
