发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE TRANSFER FILM, AND METHOD FOR PATTERN FORMATION
摘要 <p>This invention provides a photosensitive resin composition, which can realize excellent resist conformation on a substrate, and can simultaneously realize excellent developability and the refinement of peeled pieces upon etching, a photosensitive transfer film comprising a photosensitive layer formed using the photosensitive resin composition, and a method for pattern formation which can form a high-definition pattern using the photosensitive transfer film. The photosensitive resin composition is characterized by comprising a binder, a polymerizable compound, and a photopolymerization initiator and having a melt viscosity of 40,000 to 120,000 Pa.s at 50°C and 5,000 to 20,000 Pa.s at 70°C.</p>
申请公布号 KR20080085173(A) 申请公布日期 2008.09.23
申请号 KR20087017443 申请日期 2008.07.17
申请人 FUJIFILM CORPORATION 发明人 MINAMI KAZUMORI;GOTO YASUTOMO;SATO MORIMASA
分类号 G03F7/028;G03F7/004 主分类号 G03F7/028
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