发明名称 |
Targets for measurements in semiconductor devices |
摘要 |
Targets or test structures used for measurements in semiconductor devices having long lines exceeding design rule limitations are divided into segments. In one embodiment, the segments have periodicity in a direction parallel to the length of the lines. In another embodiment, the segments of test structures in adjacent lines do not have periodicity in a direction parallel to the length of the lines. The lack of periodicity is achieved by staggering segments of substantially equal lengths in adjacent lines, or by dividing the lines into segments having unequal lengths. The test structures may be formed in scribe line regions or die regions of a semiconductor wafer.
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申请公布号 |
US7427774(B1) |
申请公布日期 |
2008.09.23 |
申请号 |
US20050119029 |
申请日期 |
2005.04.29 |
申请人 |
INFINEON TECHNOLOGIES AG;INFINEON TECHNOLOGIES RICHMOND, LP |
发明人 |
MANTZ ULRICH;ZAIDI SHOAIB HASAN;GOULD CHRISTOPHER |
分类号 |
H01L23/58 |
主分类号 |
H01L23/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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