发明名称 High voltage LDMOS transistor and method for fabricating the same
摘要 In accordance with the present invention, a metal oxide semiconductor (MOS) transistor has a substrate of a first conductivity type. A drift region of a second conductivity type extends over the substrate. A body region of the first conductivity type is in the drift region. A source region of the second conductivity is in the body region. A gate extends over a surface portion of the body region. The surface portion of the body region extends between the source region and the drift region to form a channel region of the transistor. A drain region of the second conductivity type is in the drift region. The drain region is laterally spaced from the body region. A first buried layer of the second conductivity type is between the substrate and drift region. The first buried layer laterally extends from under the body region to under the drain region. A second buried layer of the first conductivity type is between the first buried layer and the drift region. The second buried layer laterally extends from under the body region to under the drain region.
申请公布号 KR100859701(B1) 申请公布日期 2008.09.23
申请号 KR20020009731 申请日期 2002.02.23
申请人 发明人
分类号 H01L29/78;H01L21/336;H01L29/08;H01L29/10 主分类号 H01L29/78
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