| 摘要 |
A liquid transport device comprises a channel unit and a piezoelectric actuator. The channel unit has pressure chambers. The piezoelectric actuator changes the volume of the pressure chambers. The piezoelectric actuator consists mainly of a vibration plate, a piezoelectric layer and an anisotropic conductive layer, which is formed between the vibration plate and the piezoelectric layer. A portion of the anisotropic conductive layer is compressed to be conductive, and the other portion is insulative. The use of the anisotropic conductive layer makes the electric connection of the piezoelectric actuator simple in structure, increases the reliability of the connection and reduces the parasitic capacitance of the actuator.
|
