发明名称 |
Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same |
摘要 |
In a method and apparatus for forming a three-dimensional image for an inspection pattern, a reference intensity function of an inspection X-ray is formed in accordance with a continuous scanning depth, and is differentiated with respect to the scanning depth. The differential reference intensity function is decomposed into a start function and a characteristic function. The differential reference intensity function is then repeatedly integrated while a temporary vertical profile function is substituted for the start function until the temporary intensity of a reference X-ray is within an allowable error range. The temporary vertical profile function satisfying the error range is selected as an optimal vertical profile function. A surface shape is combined to the optimal vertical profile function along a depth of the inspection pattern to thereby form the three-dimensional image for the inspection pattern.
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申请公布号 |
US7428328(B2) |
申请公布日期 |
2008.09.23 |
申请号 |
US20050180504 |
申请日期 |
2005.07.12 |
申请人 |
SAMSUNG ELECTRONIC CO., LTD. |
发明人 |
JEE YUN-JUNG;JUN CHUNG-SAM;YANG YU-SIN;KIM TAE-KYOUNG |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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