发明名称 Method of activating a silicon surface for subsequent patterning of molecules onto said surface
摘要 The present invention relates to a method of activating a silicon surface for subsequent patterning of molecules onto said surface, and to patterns produced by this method, and further to uses of said pattern.
申请公布号 US7427477(B2) 申请公布日期 2008.09.23
申请号 US20040003805 申请日期 2004.12.03
申请人 SONY DEUTSCHLAND GMBH 发明人 WESSELS JURINA;FORD WILLIAM E.;YASUDA AKIO
分类号 C12Q1/68;H01L21/28;B05D3/04;B05D3/10;B05D5/00;C07H21/00;C12Q1/70;G03F7/00;G03F7/26;H01L21/02;H01L21/306;H01L21/3205 主分类号 C12Q1/68
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