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发明名称	VALVE FOR PREVENTION OF DEPOSITION
摘要
申请公布号	KR100859627(B1)	申请公布日期	2008.09.23
申请号	KR20060135406	申请日期	2006.12.27
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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