Methods of fabricating semiconductor devices including trench device isolation layers having protective insulating layers and related devices

摘要

A method of fabricating a semiconductor device includes forming an active region including opposing sidewalls and a surface therebetween protruding from a substrate. A protective insulating layer is formed on the sidewalls of the active region, and extends away from the substrate to beyond the surface of the active region. A device isolation layer is also formed on the opposing sidewalls of the active region, and extends along the protective insulating layer to beyond the surface of the active region. As such, the protective insulating layer may protect portions of the device isolation layer extending therealong during subsequent fabrication processes. Related devices are also discussed.