| 发明名称 |
Method and apparatus for optically analyzing a surface |
| 摘要 |
A method and apparatus for analyzing a surface of a test object employs apparatus with a scanning interferometry system which generates a windowed interferometric signal from the surface of a test object to characterize the surface of the test object.
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| 申请公布号 |
US7428056(B2) |
申请公布日期 |
2008.09.23 |
| 申请号 |
US20060373862 |
申请日期 |
2006.03.10 |
| 申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
FREISCHLAD KLAUS;TANG SHOUHONG |
| 分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
| 代理机构 |
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代理人 |
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