发明名称 |
Apparatus for ascertaining the light power level of a light beam, and scanning microscope |
摘要 |
An apparatus for ascertaining properties of a light beam, comprises a means for splitting a measured beam out from the light beam and comprises at least one detector that at least partially receives the measured beam. A polarization-influencing means is arranged in the beam path of the measured beam in order to enhance reliability and reproducibility.
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申请公布号 |
US7428043(B2) |
申请公布日期 |
2008.09.23 |
申请号 |
US20040854987 |
申请日期 |
2004.05.27 |
申请人 |
LEICA MICROSYSTEMS CMS GMBH |
发明人 |
BOEHM INGO;SCHREIBER FRANK |
分类号 |
G01J1/42;G01J3/14;G01J3/28;G01J3/42;G01J3/447;G01J4/00;G02B21/00 |
主分类号 |
G01J1/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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