| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing alignment layer with which productivity thereof is improved and quality desired therefor is obtained, and a method for manufacturing liquid crystal device. SOLUTION: In the method for manufacturing alignment layer by depositing an inorganic alignment layer on a substrate inside a chamber with predetermined atmosphere, the method includes alkylation treatment and deposition process S4a to alkylate an inorganic material flying from an inorganic material supplying means and deposit it on the substrate. COPYRIGHT: (C)2008,JPO&INPIT
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