发明名称 Semiconductor device, semiconductor display device, and manufacturing method of semiconductor device
摘要 To achieve high performance of a semiconductor integrated circuit depending on not only a microfabrication technique but also another way. In addition, to achieve low power consumption of a semiconductor integrated circuit. A semiconductor device is provided in which crystal faces and/or crystal axes of single-crystalline semiconductor layers of a first conductive MISFET and a second conductive MISFET are different. The crystal faces and/or crystal axes are arranged so that mobility of carriers flowing in channel length directions in the respective MISFETs is increased. Such a structure can increase mobility of carriers flowing through channels of the MISFETs and high speed operation of a semiconductor integrated circuit can be achieved. Further, low voltage driving becomes possible, and low power consumption can be realized.
申请公布号 US2008224274(A1) 申请公布日期 2008.09.18
申请号 US20080073927 申请日期 2008.03.12
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;MIYAIRI HIDEKAZU
分类号 H01L21/30;H01L29/04 主分类号 H01L21/30
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