| 摘要 |
A vibration detection device includes: a light source emitting a laser beam; an interferometer including a vibrating body and a reflecting body both capable of reflecting the laser beam, a polarizing beam splitter splitting a laser beam emitted from the light source into beams traveling along first and second optical paths, a first ¼ wave plate arranged between the polarizing beam splitter and the vibrating body in the first optical path, and a second ¼ wave plate arranged between the polarizing beam splitter and the reflecting body in the second optical path, the interferometer causing interference between a reflected beam reflected by the vibrating body and a reference beam reflected by the reflecting body to form a interference pattern; and a detection means quantizing the vibration of the vibrating body on the basis of the formed interference pattern to detect the vibration.
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