| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition excelling in various performances and providing a spacer of a proper shape, even with low exposure energy. <P>SOLUTION: The radiation-sensitive resin composition comprises (A) a block copolymer having at least two block segments, wherein each of the two block segments of the block copolymer is prepared by polymerizing one or more selected from among (a1) a compound typified by allyl methacrylate, (a2) an unsaturated carboxylic acid or an unsaturated carboxylic acid anhydride and (a3) another unsaturated compound, combinations of compounds constituting the block segments are different from each other, and at least one of the two block segments contains the compound (a1) as a constituent compound, (B) a polymerizable unsaturated compound and (C) a radiation-sensitive polymerization initiator. <P>COPYRIGHT: (C)2008,JPO&INPIT |
