| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a refining method of an immersion oil having excellent characteristics as an immersion solution. <P>SOLUTION: The refining method of immersion oil comprises a contacting step for bringing a liquid organic compound into contact with a solid base. Here, the solid base is barium oxide. <P>COPYRIGHT: (C)2008,JPO&INPIT |
