GATE VOLTAGE CONTROL SYSTEM AND METHOD FOR ELECTROSTATICALLY ACTUATING MICRO-ELECTROMECHANICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a gate voltage control system for electrostatically actuating a MEMS switch 14.

SOLUTION: The gate voltage control system includes an electrostatically responsive actuator movable through a gap for changing over a close state/open state. A drive circuit 10 applies a gate voltage to a gate terminal 16 of a device in accordance with a gate voltage control sequence. The gate voltage control sequence includes: a first interval T1 for ramping up the gate voltage at a certain rate to a voltage level for producing an electrostatic force sufficient to accelerate the actuator through a portion of the gap to be traversed by the actuator to reach each actuating condition; a second interval T2 for ramping down the gating voltage at a certain rate to a level sufficient to reduce the electrostatic force acting on the movable actuator.

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