| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To arrange a manufactured probe in a prober without exposing it in an atmosphere. <P>SOLUTION: The probe housing container is used to supply a probe to a prober without exposing it in an atmosphere. Preferably, an oxide film is removed from the tip end of the probe without exposing the probe in the atmosphere through dry processing using an ion source or the like, and the probe is housed in the probe housing container. Thus, the probe can be replaced and attached in the prober without exposing it in an atmosphere, avoiding the formation of an oxide film on the surface of the probe. In addition, an operator is unnecessary to directly touch the probe when attaching the prober to the prober, preventing its tip end from being broken. Thus, electrical characteristics of a semiconductor element or the like on a wafer can be stably measured. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
