| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrier for achieving simplified structure and low cost by reducing the number of sensors to detect positions of a substrate. SOLUTION: A start sensor 19A detects a first start selection point located at an end surface in the diameter direction R viewed from the center of substrate S and a second start selection point located at an end surface in the rotating directionθviewed from the center of substrate S. A controller calculates the center of substrate based on detection result of the start sensor 19A and carries the center of substrate S to a compensated leading point RB. COPYRIGHT: (C)2008,JPO&INPIT
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