| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus that can lead a showerhead to a predetermined temperature within a short time and wherein temperature stability of the showerhead is high. SOLUTION: The film-forming apparatus 1 comprises: a chamber 2; a showerhead 10; a gas-supplying mechanism 30 that supplies a process gas into the chamber 2 through the showerhead 10; a showerhead-temperature controlling unit 60 that controls a temperature of the showerhead 10; and a heat insulating material 20. The showerhead-temperature controlling unit 60 comprises: heaters 17, 18 that heat the showerhead 10; cooling mechanisms 61a, 61b that cool the showerhead 10; a thermocouple 65a or the like that detects the temperature of the showerhead; and a controller 62 that at least controls the heaters 17, 18 based on the detected result from the temperature controlling mechanism. The showerhead-temperature controlling unit 60 further comprises a space 19 between the showerhead 10 and the heat insulating material 20, to which a cooling gas from the cooling mechanisms 61a, 61b is supplied. COPYRIGHT: (C)2008,JPO&INPIT
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