发明名称 SHEET-MOUNTING DEVICE AND ITS METHOD
摘要 A sheet-mounting device comprises a loading means (11) including a table (15) on which a semiconductor wafer (W) and a ring frame (RF) are placed and a mounting means for mounting an adhesive sheet (S) onto the semiconductor wafer (W) and the ring frame (RF). The loading means (11) comprises an alignment unit (21) for positioning the wafer (W) by its interaction with a sensor. Since the wafer (W) is positioned in such a state that the wafer is transferred and loaded on the table (15), it is not required to perform the positioning in the previous step.
申请公布号 WO2008111348(A1) 申请公布日期 2008.09.18
申请号 WO2008JP52222 申请日期 2008.02.12
申请人 LINTEC CORPORATION;YOSHIOKA, TAKAHISA;SUGISHITA, YOSHIAKI 发明人 YOSHIOKA, TAKAHISA;SUGISHITA, YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项
地址