发明名称 |
Methode und Apparat zur Optimierung der Beleuchtung einer Schicht eines vollständigen Chips |
摘要 |
Optimisation of illumination for a full-chip layer is disclosed. A pitch frequency of the full-chip layer is determined (10) so as to generate a pitch frequency histogram (12) of the full- chip layer. The pitch frequency indicates how often a given pitch occurs in the full-chip layer. The pitch frequency histogram is equated to be the first eigenfunction from the sum of coherent system representation of a transformation cross coefficient (16). An integral equation for the first eigenfunction of the transformation cross coefficient is solved (18) so as to define the optimal illumination for imaging the full-chip layer (20). |
申请公布号 |
DE602006002044(D1) |
申请公布日期 |
2008.09.18 |
申请号 |
DE20066002044T |
申请日期 |
2006.02.21 |
申请人 |
ASML MASKTOOLS B.V. |
发明人 |
SOCHA, ROBERT;CHEN, JANG FUNG |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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