| 摘要 |
PROBLEM TO BE SOLVED: To facilitate feed-rate control of reactive molecular gas in polymer chain/thin film growth, to improve growth controllability by excluding byproducts from a growth region, to increase utilization efficiency of the reactive molecule, and to attain the high speed of molecular switching speed. SOLUTION: Effective means are: CG-MLD/OCVD; MLD/OCVD using a solution; FC-MLD/OCVD using a flow passage circuit; and MLD/OCVD using a seed core. COPYRIGHT: (C)2008,JPO&INPIT |
