| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester by which a space-saving is attained by unifying indicators respectively provided in a tester controller and a prober controller and by making one indicator. SOLUTION: In the semiconductor tester equipped with: a test head indicator provided at the tester controller of a test head for displaying an operating state of the head; and a prober indicator displaying an operating state of the prober controller which performs a probing of a tested wafer, while providing a multiplexer inputting an operating signal transmitted to these indicators in place of the test head indicator and the prober indicator, there is provided an integrated indicator which displays a signal switched by this multiplexer. COPYRIGHT: (C)2008,JPO&INPIT
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