| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure for suppressing reflection or scattering at a butt joint. SOLUTION: A semiconductor waveguide element consisting of a series connection in the optical waveguide direction of two or more optical waveguides each including one or more layer of lower clad 1, optical waveguide 15 having an optical refractive index larger than that of the lower clad 1, and upper clad 4 having a refractive index smaller than that of the optical waveguide layer 15, respectively, is configured such that the bonding surface 14 of an active waveguide layer 2 and a nonactive waveguide layer 3 has an inclination in the direction intersecting the waveguide direction perpendicularly. COPYRIGHT: (C)2008,JPO&INPIT
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