| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device and a positioning method, positioning a moving member so that the detection output becomes maximum in a short time. SOLUTION: According a positioning method for moving the moving member moved within a movable range by a driving device so that the detection output of the position detecting means whose detection output changes depending on the position of the moving member becomes maximum, the moving member is returned to the origin at the end of the movable range, the detection output is confirmed every time the moving member is pitch-fed by a predetermined moving amount each, and when the detection output is more than a predetermined threshold, scanning is performed to stop pitch-feeding, the moving member is moved from the stopped position by a predetermined vary small amount by scanning to confirm the detection output, and perform fine adjustment for moving the moving member in the direction estimated to increase the detection output. COPYRIGHT: (C)2008,JPO&INPIT
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