| 摘要 |
PROBLEM TO BE SOLVED: To realize a positioning stage having the function of absorbing the non-parallelism between the linear guides arranged parallel to each other. SOLUTION: In this positioning stage, a pair of linear motors each having a slider so controlled as to be axially moved are arranged parallel to each other at a predetermined interval, and the sliders of the pair of linear motors are connected to each other through a bridge member. The positioning stage comprises a slide mechanism interposed at the joint part of one of the bridge member and the slider and allows the bridge member to move in the bridging direction. COPYRIGHT: (C)2008,JPO&INPIT
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