METHOD AND DEVICE FOR DETERMINING A FRACTURE IN CRYSTALLINE MATERIAL

摘要

The invention relates to a method for determining a fracture (18) in crystalline material. According to the invention, a position function of the brightness of the transmitted light image (16) is obtained from a transmitted light image (16) of the material, and frequency information of the position function is obtained therefrom. It is then decided is a fracture (18) exists if the frequencies characterising the fracture (18) are present. It is also possible to detect externally invisible fractures (18) in a wafer (4) and to reliably identify grain boundaries (20) and fractures (18).