NANOLITHOGRAPHY WITH USE OF VIEWPORTS

摘要

Two dimensional arrays of cantilevers for use in transferring inks from t he cantilever tip to substrates are improved with use of viewports to view t he cantilevers from a far side. This improves the leveling behavior when lar ge numbers of cantilevers are present. It also provides for better laser acc ess. Bioarrays and combinatorial applications are particularly important. Ma ssively parallel direct write printing with more than 55,000 cantilever tips can be achieved.