| 摘要 |
A method for preparing a phenol-based acrylate compound is provided to produce the phenol-based acrylate compound capable of forming polymers useful as a resin component of a chemically amplified type positive functional resist. A method for preparing a phenol-based acrylate compound includes the steps of: (a) reacting a polyhydroxyphenyl compound with an anhydride to prepare an intermediate phenyl compound having a ring substituent at hydroxyl and ester parts; and (b) reacting the intermediate phenyl compound with an ester compound to prepare a phenol-based acrylate compound. The phenol-based acrylate compound has a structure represented by the following formula 1, wherein R is hydrogen or C1-6 alkyl.
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