DEVICE AND METHOD FOR MANUFACTURING A PARTICULATE FILTER WITH REGULARLY SPACED MICROPORES
摘要
Various embodiments disclose devices and methods for fabricating microporous particulate filters with regularly space pores wherein sheet membrane substrates are exposed to energetic particle radiation through a mask and the damaged regions removed in a suitable developer. The required depth of field is achieved by using energetic particles to minimize diffraction and an energetic particle source with suitably small diameter.
申请公布号
WO2008112888(A1)
申请公布日期
2008.09.18
申请号
WO2008US56848
申请日期
2008.03.13
申请人
UNIVERSITY OF HOUSTON;WOLFE, JOHN C.;RUCHHOEFT, PAUL