发明名称 MANUFACTURING METHOD OF PRODUCT, AND PROCESS MANAGEMENT PROGRAM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a product and a process management program for appropriately eliminating abnormal data to perform process management. <P>SOLUTION: With respect to a set of N-pieces of numerical data acquired in the manufacturing process of the product, the method comprises aligning numeric data, belonging to the set, in the order of separation from a mean value of the group (Step S11); obtaining, from the set, a standard deviationσ<SB>k</SB>of the remaining from which k (k is an integer from 1 to n, and n is an integer three or larger and smaller than N) pieces of numeric data is temporarily eliminated for all values of k in the order of separation from the mean value of the group, obtaining a ratio r<SB>k</SB>of the standard deviationσ<SB>k</SB>and a standard deviationσ<SB>k-1</SB>, obtaining an absolute value d<SB>k</SB>of a difference between the ratio r<SB>k</SB>and a ratio r<SB>k+1</SB>, obtaining a value k<SB>0</SB>of a k so that the absolute value d<SB>k</SB>of the difference becomes maximum, and setting the value k<SB>0</SB>as the number of pieces of abnormal data (Step S12); and eliminating, from the set, k<SB>0</SB>pieces of numeric data in the order of separation from the mean value (Step S13). <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008217280(A) 申请公布日期 2008.09.18
申请号 JP20070052152 申请日期 2007.03.02
申请人 TOSHIBA CORP 发明人 KUBO TOMOAKI
分类号 G05B19/418;H01L21/02 主分类号 G05B19/418
代理机构 代理人
主权项
地址