| 摘要 |
PROBLEM TO BE SOLVED: To easily detect a positional dislocation quantity of an alignment object, by simplifying processing of an imaged image. SOLUTION: This alignment device has an imaging means 1 for juxtaposing and having a plurality of light receiving elements 7 in a straight line shape and imaging three fine line-shaped patterns 15a to 15c arranged on a surface of the alignment object 5 by crossing at a predetermined angle with the substantially parallel axis O<SB>2</SB>in the row direction of the light receiving elements 7, a displacement means 2 for displacing the alignment object 5 in an XY plane, and a control means 4 driving and controlling the displacement means 2 to correct the positional dislocation quantity in the X-axis and Y-axis direction of the alignment object 5, by calculating the positional dislocation quantity of the alignment object 5 in the Y-axis direction by measuring a distance between a reference light receiving element preset in one of the plurality of light receiving elements 7 and a reference position preset in the three fine line-shaped patterns, by calculating the positional dislocation quantity of the alignment object 5 in the X-axis direction by measuring an interval between the three fine line-shaped pattern, by processing the image imaged by the imaging means 1. COPYRIGHT: (C)2008,JPO&INPIT |
