发明名称 ENTRY LOCK SYSTEM, WEB PROCESSING INSTALLATION, AND METHOD FOR USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an entry lock system for feeding web from a web supply unit to a web processing facility having the entry lock system, the web processing facility having the entry lock system, and to provide a method for using them. SOLUTION: This entry lock system comprises a first chamber having an inlet port and an outlet port, a second chamber having an inlet port, a first seal arranged at the inlet port of the first chamber, a second seal arranged between the first chamber and the second chamber, a first web storage unit arranged in the first chamber, and a second web storage unit arranged in the second chamber. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008218990(A) 申请公布日期 2008.09.18
申请号 JP20080023164 申请日期 2008.02.01
申请人 APPLIED MATERIALS INC 发明人 SAUER PETER;HEIN STEFAN
分类号 H01L21/02 主分类号 H01L21/02
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