| 摘要 |
PROBLEM TO BE SOLVED: To provide a stacked type stamper having a durable composition, and a manufacturing method for easily manufacturing the stacked type stamper. SOLUTION: Almost the same state is given to a first interface 3 being a joint surface between a first metal layer 2 and a polymer film 4 as a heat insulating layer and a second interface 5 being a joint surface between a second metal layer 6 and the polymer film 4, and both interfaces 3 and 5 coming into contact with a polymer material 4' being in a liquid state are set to the same state allowing an anchor effect of the polymer to be sufficiently revealed, and thus the problem of exfoliation due to conventional difference between interface states is resolved to improve the durability. COPYRIGHT: (C)2008,JPO&INPIT
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